Beneq Launches Roll-to-Roll ALD System for Wide Flexible Substrates

Following the pioneering work in spatial atomic layer deposition and the launch of the revolutionizing research and development tool TFS 200R for continuous ALD in 2009, Beneq has closed the deal for a roll-to-roll ALD system, the Web Coating System WCS 500. The first WCS 500 unit will be delivered to the ASTRaL laboratory at Lappeenranta University of Technology (FIN).

“The WCS 500 is a true roll-to-roll ALD platform, designed to enable scale-up from R&D to pilot manufacturing,” Beneq CTO Dr. Tommi Vainio said. “With the WCS 500, we look to meet especially the growing need for high-quality moisture barriers in the flexible electronics industry. We believe there are multiple opportunities for a product that combines high ALD film quality with the productivity and cost of ownership of roll-to-roll manufacturing. WCS 500 accepts webs up to 500 mm in width.”

“The WCS 500 tool will open up many new exciting research areas in thin film materials,” Professor David Cameron, director of ASTRaL, said. “The new system will allow us to build on our pioneering work on the continuous ALD process and to develop novel roll-to-roll applications where ALD has not been usable up till now.”